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MEG-SS8B1

Wafer Spin Scrubber MEG-SS8B1

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DescriptionSpecification
Wafer Size Φ4~8” (100mm~200mm)
Transfer Robot Multi Transfer Unit
IDR 2Arms, MTR 2Arms
Process Method PVA Brush Cleaning(APCS), PVA Bevel Brush Cleaning
Ultra Sonic Cleaning, Jet Nano Spray (MC Spray)
E-Flow System (CO2)
OtherFollowed Semi Standard
OSMS Windows10 Based, Ether-CAT
FAFDC, SECSII, GEM Automation
Max speed 300WPH
Process Throughput Front 6chamber Process Time 56/sec 250WPH
Both (3Front, 3Back) Process Time 56/sec 140WPH
엔씨케이티(주) 대표자 : 김태경 사업자등록번호 : 124-81-71232 대표전화 : 031-378-1122 FAX : 031-662-1161 E-Mail : nck@nck.co.kr 주소 : 경기도 평택시 진위면 동부대로 91
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